Japan’s Nikon sues ASML, Zeiss over chip-making technology
Nikon Corp. said Monday it has taken legal action in the Netherlands, Germany and Japan over the use of semiconductor lithography technology in products made by Dutch and German companies.
Nikon said it is seeking to stop Dutch company ASML Holding N.V. and its supplier Carl Zeiss SMT GmbH from using patented technology without its permission.
The move followed a failure of mediation to settle a disagreement over the right to use the technology in making computer chips.
ASML expressed disappointment over Nikon’s action and denied it had infringed on any of Nikon’s patents.
“ASML believes that Nikon’s claim is without merit. We will defend ourselves vigorously against the allegations and we will consider all means at our disposal,” ASML said in a statement.